Journal of Microelectromechanical Systems
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 704
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > C3
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > C1 - C4
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > C2
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 588 - 592
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 559 - 568
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 519 - 527
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 609 - 615
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 569 - 579
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 550 - 558
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 528 - 538
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 539 - 549
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 616 - 623
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 624 - 631
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 601 - 608
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 504 - 506
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 580 - 587
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 507 - 518
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 653 - 661
Journal of Microelectromechanical Systems > 2017 > 26 > 3 > 662 - 670